Title :
Raman Determination Of Crystallographic Orientation In Silicon On Insulators
Author :
Nakashima, S. ; Takabe, H. ; Mizoguchi, K.
Author_Institution :
Osaka University
Keywords :
Apertures; Cameras; Crystallography; Insulation; Lenses; Physics; Polarization; Raman scattering; Semiconductor films; Silicon on insulator technology;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
DOI :
10.1109/LEOS.1990.690688