DocumentCode

3355784

Title

Raman Determination Of Crystallographic Orientation In Silicon On Insulators

Author

Nakashima, S. ; Takabe, H. ; Mizoguchi, K.

Author_Institution

Osaka University

fYear

1990

fDate

4-9 Nov 1990

Firstpage

588

Lastpage

589

Keywords

Apertures; Cameras; Crystallography; Insulation; Lenses; Physics; Polarization; Raman scattering; Semiconductor films; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE

Print_ISBN

0-87942-550-4

Type

conf

DOI

10.1109/LEOS.1990.690688

Filename

690688