3D shape reconstruction of microstructures via micro stereovision

Micro stereovision based on stereo light microscope(SLM) is used in micro-domains such as micromanipulation, microassembly, micromeasurement, etc al. In this paper, micro stereovision via SLM is applied to the 3D shape reconstruction of microstructures. The model development for microvision via SLM is discussed , and a vision model that describes the projection between 2D image space and 3D object space is derived. A pair of optical paths of SLM is denoted by a group of basic points and basic planes, and then two models of micro stereovision with SLM are derived via the geometrical projection of virtual incident rays and the weak nonlinear phenomenon. At last, experiments are given for 3D shape reconstruction of microstructures this model.