Title :
Mapping Of Deep Level Concentration In Semi-insulating GaAs Wafers With A Laser Diode (λ=1.3 μm)
Author :
Pan, Ci-Ling ; Chang, C.-S. ; Wu, Hsiao-Hua ; Hsieh, Tzung-Rue
Author_Institution :
National Chiao Tung University
Keywords :
Absorption; Annealing; Diode lasers; Etching; Gallium arsenide; Plasma applications;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
DOI :
10.1109/LEOS.1990.690692
