DocumentCode
3356456
Title
Modeling and measurements in Atomic Force Microscopy Resonance Modes
Author
Belikov, Sergey ; Yermolenko, Ivan ; Magonov, Sergei
Author_Institution
NT-MDT Dev. Inc., Tempe, AZ, USA
fYear
2015
fDate
1-3 July 2015
Firstpage
3484
Lastpage
3489
Abstract
Quantitative Nanoscale Mechanical (QNM) studies in Atomic Force Microscopy (AFM) are usually associated with the Contact and Non-Resonance modes. The extraction of QNM data in AFM Resonance modes, such as Amplitude and Frequency Modulation, is a more challenging task. This paper describes a novel modeling techniques for the AFM Resonance modes and related QNM applications. The approach is based on Krylov-Bogoliubov-Mitropolsky (KBM) asymptotic dynamics of AFM in resonance modes.
Keywords
amplitude modulation; atomic force microscopy; frequency modulation; AFM resonance modes; Krylov-Bogoliubov-Mitropolsky asymptotic dynamics; amplitude modulation; atomic force microscopy resonance modes; contact modes; frequency modulation; modeling techniques; nonresonance modes; Energy dissipation; Force; Frequency modulation; Mathematical model; Probes; Resonant frequency; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
American Control Conference (ACC), 2015
Conference_Location
Chicago, IL
Print_ISBN
978-1-4799-8685-9
Type
conf
DOI
10.1109/ACC.2015.7171870
Filename
7171870
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