DocumentCode :
3356969
Title :
Evaluation Of Semiconductor Interfaces By Cathodoluminescence
Author :
Wada, Kazumi
Author_Institution :
NTT LSI Laboratories
fYear :
1990
fDate :
4-9 Nov 1990
Firstpage :
607
Lastpage :
610
Keywords :
Art; Carrier confinement; Electron beams; Gallium arsenide; Laboratories; Large scale integration; Lorentz covariance; Magnetic fields; Spatial resolution; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
Type :
conf
DOI :
10.1109/LEOS.1990.690695
Filename :
690695
Link To Document :
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