DocumentCode
3357109
Title
Complex mathematical models of comb drive accelerometers
Author
Wiak, S. ; Smólka, K.
Author_Institution
Inst. of Mechatron. & Inf. Syst., Tech. Univ. of Lodz, Lodz
fYear
2007
fDate
10-12 Sept. 2007
Firstpage
385
Lastpage
392
Abstract
This paper deals with the numerical modelling of 3D structure of surface micromachined (MEMS) accelerometers. Keeping knowledge about predefined accelerometer structure we start computer simulation procedure leading to final structure design, then to be defined as a basic structure for object oriented models.
Keywords
accelerometers; micromechanical devices; MEMS; comb drive accelerometers; object oriented models; surface micromachined accelerometers; Accelerometers; Computer simulation; Design automation; Fabrication; Intelligent sensors; Mathematical model; Microelectromechanical systems; Micromechanical devices; Object oriented modeling; Sensor arrays;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Machines and Power Electronics, 2007. ACEMP '07. International Aegean Conference on
Conference_Location
Bodrum
Print_ISBN
978-1-4244-0890-0
Electronic_ISBN
978-1-4244-0891-7
Type
conf
DOI
10.1109/ACEMP.2007.4510533
Filename
4510533
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