Title :
Complex mathematical models of comb drive accelerometers
Author :
Wiak, S. ; Smólka, K.
Author_Institution :
Inst. of Mechatron. & Inf. Syst., Tech. Univ. of Lodz, Lodz
Abstract :
This paper deals with the numerical modelling of 3D structure of surface micromachined (MEMS) accelerometers. Keeping knowledge about predefined accelerometer structure we start computer simulation procedure leading to final structure design, then to be defined as a basic structure for object oriented models.
Keywords :
accelerometers; micromechanical devices; MEMS; comb drive accelerometers; object oriented models; surface micromachined accelerometers; Accelerometers; Computer simulation; Design automation; Fabrication; Intelligent sensors; Mathematical model; Microelectromechanical systems; Micromechanical devices; Object oriented modeling; Sensor arrays;
Conference_Titel :
Electrical Machines and Power Electronics, 2007. ACEMP '07. International Aegean Conference on
Conference_Location :
Bodrum
Print_ISBN :
978-1-4244-0890-0
Electronic_ISBN :
978-1-4244-0891-7
DOI :
10.1109/ACEMP.2007.4510533
