Title :
The Influence Of Substrate Defects And Substrate Surface Quality On The Optical And Electrical Properties Of Epitaxial InGaAs:InP
Author :
Miner, C.J. ; Knight, D.G. ; Watt, B. ; Blaauw, C. ; Puetz, N.
Author_Institution :
Bell-Northern Research
Keywords :
Buffer layers; Cleaning; Epitaxial layers; Indium gallium arsenide; Indium phosphide; MOCVD; Optical buffering; Photoluminescence; Spatial resolution; Substrates;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
DOI :
10.1109/LEOS.1990.690697