Title :
Micromachined tunable vertical-cavity surface-emitting lasers
Author :
Larson, Michael C. ; Sugihwo, F. ; Massengale, A.R. ; Harris, J.S., Jr.
Author_Institution :
Solid State Electron. Lab., Stanford Univ., CA, USA
Abstract :
We report a record continuous wavelength tuning range without mode hopping of up to 2.0% in a vertical-cavity surface-emitting laser (VCSEL) utilizing a monolithically-fabricated electrostatically-movable micromirror. A device with a 30 /spl mu/m square top mirror and 4 /spl mu/m diameter active region exhibits a continuous wavelength range of 19.1 nm near 960 nm for 0-18 V tuning bias, a threshold current less than 0.4 mA, and a quantum efficiency of 6.5%. Microsecond wavelength switching is also observed.
Keywords :
laser mirrors; laser tuning; micromachining; surface emitting lasers; 0 to 18 V; 0.4 mA; 6.5 percent; 960 nm; continuous wavelength tuning; electrostatically-movable micromirror; micromachining; monolithic fabrication; quantum efficiency; threshold current; vertical-cavity surface-emitting laser; wavelength switching; Biomembranes; Laser modes; Laser tuning; Mirrors; Optical filters; Optical refraction; Optical tuning; Surface emitting lasers; Tunable circuits and devices; Vertical cavity surface emitting lasers;
Conference_Titel :
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3393-4
DOI :
10.1109/IEDM.1996.553613
