DocumentCode :
3358378
Title :
Applications Of Optical Scatterometry To Microelectronics. Materials Processing
Author :
McNeil, J.R.
Author_Institution :
University of New Mexico
fYear :
1990
fDate :
4-9 Nov 1990
Firstpage :
628
Lastpage :
628
Keywords :
Diffraction gratings; Light scattering; Materials processing; Microelectronics; Optical materials; Optical scattering; Radar measurements; Raman scattering; Rough surfaces; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
Type :
conf
DOI :
10.1109/LEOS.1990.690703
Filename :
690703
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3358378
