Abstract :
The present paper briefly discusses possibilities of the instant IPIB diagnostics based on the spectroscopy of the back-scattered/sputtered ions and X-rays generated due to the IPIB-solid interaction. The peculiarities of the RBS/PIXE diagnostic facilities are theoretically examined for short-pulsed ion implantation ("MUK-M"-accelerator with C/sup n+/ and Al/sup n+/ ion species, voltage U=100 kV, pulse duration /spl tau/=100 ns, flux per shot /spl Phi/=10/sup 12/ cm/sup -2/), ion beam surface treatment ("TEMP-1", C/sup n+/ and H/sup +/, U=300 kV, /spl tau/=50 ns, /spl Phi/=10/sup 13/ cm/sup -2/) and film deposition ("TEMP-2", C/sup n+/ and H/sup +/, U=450 kV, /spl tau/=100 ns, /spl Phi/=10/sup 14/ cm/sup -2/) processing. It is shown that the RBS/PIXE spectroscopy with crystal and magnet analyzers and pin-diode or linear CCD arrays, allows to obtain main IPIB parameters (ion species, energy distribution, flux) during the technological process, i.e. the instant IPIB diagnostics is possible.
Keywords :
Rutherford backscattering; X-ray chemical analysis; ion beam applications; ion beam effects; ion implantation; p-i-n diodes; sputter deposition; sputtering; surface treatment; 100 kV; 100 ns; 300 kV; 450 kV; IPIB diagnostics; IPIB-solid interaction; PIXE; RBS; Rutherford backscattering; energy distribution; film deposition; instant intense pulsed ion beams diagnostics; ion beam surface treatment; ion flux; ion induced characteristic X-ray emission; ion species; linear CCD arrays; pin-diode spectroscopy; short-pulsed ion implantation; Current measurement; Ion beams; Magnetic analysis; Magnetic flux; Nuclear power generation; Polymer films; Space vector pulse width modulation; Spectroscopy; Surface treatment; Voltage;
