Title :
A Thermosensitive Quartz Resonator With A Build-in Microheater As A Multipurpose Sensor
Author :
Spassov, L. ; Yankov, D.Y. ; Georgiev, Vjaceslav ; Yossifov, E.
Author_Institution :
Lazar Vergov Institute of Solid State Physics, Bulgarian Academy of Sciences
Keywords :
Electrodes; Fluid flow; Physics; Resonant frequency; Solid state circuits; Strips; Temperature dependence; Temperature distribution; Temperature sensors; Thermal sensors;
Conference_Titel :
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location :
Moscow, Russia
DOI :
10.1109/ISSWAS.1994.662120