DocumentCode
3362442
Title
Is there a better material for thin film BAW applications than A1N?
Author
Muralt, P. ; Antifakos, J. ; Cantoni, M. ; Lanz, R. ; Martin, F.
Volume
1
fYear
2005
fDate
18-21 Sept. 2005
Firstpage
315
Lastpage
320
Keywords
Aluminum nitride; Ferroelectric materials; Film bulk acoustic resonators; Microwave filters; Piezoelectric films; Piezoelectric materials; Q factor; Resonator filters; Semiconductor materials; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2005 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-9382-1
Type
conf
DOI
10.1109/ULTSYM.2005.1602858
Filename
1602858
Link To Document