Tantalum nitride thin film resistors for integration into copper metallization based RF-CMOS and BiCMOS technology platforms

Author

Henderson, R. ; Zurcher, P. ; Duvallet, A. ; Happ, C. ; Petras, M. ; Raymond, M. ; Remmel, T. ; Roberts, D. ; Steimle, B. ; Straub, S. ; Sparks, T. ; Tarabbia, M. ; Miller, M.

Author_Institution

Mater. Struct. Labs., Motorola Inc., Tempe, AZ, USA

fYear

2001

fDate

14-14 Sept. 2001

Firstpage

71

Lastpage

74

Abstract

Metal thin film resistors have been integrated into a damascene-copper multilayer metallization system for mixed-signal BiCMOS technology platforms. The thin film process can be adjusted to achieve resistors with very low temperature coefficients, high linearity, low noise, and improved matching as compared to resistors based on implanted silicon or polysilicon processing. In addition, improvement in terms of good RF performance was observed.

Keywords

BiCMOS integrated circuits; CMOS integrated circuits; copper; electron device noise; impedance matching; integrated circuit interconnections; integrated circuit measurement; integrated circuit metallisation; mixed analogue-digital integrated circuits; tantalum compounds; thin film resistors; Cu metallization based BiCMOS technology platform; Cu metallization based RF-CMOS technology platform; Cu-TaN; RF performance; Tantalum nitride thin film resistors; damascene-copper multilayer metallization system; implanted silicon; linearity; metal thin film resistors; mixed-signal BiCMOS technology platforms; noise; polysilicon processing; resistor matching; resistors; temperature coefficients; thin film process; BiCMOS integrated circuits; Copper; Linearity; Metallization; Nonhomogeneous media; Resistors; Semiconductor thin films; Silicon; Temperature; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Silicon Monolithic Integrated Circuits in RF Systems, 2001. Digest of Papers. 2001 Topical Meeting on

Conference_Location

Ann Arbor, MI, USA

Print_ISBN

0-7803-7129-1

Type

conf

DOI

10.1109/SMIC.2001.942343

Filename

942343