Title :
Silicon Microfabricated Horns for Power Ultrasonics
Author :
Lal, Amit ; White, Richard M.
Author_Institution :
University of California at Berkeley
Keywords :
Actuators; Bonding; Ceramics; Impedance; Silicon; Surgery; Titanium alloys; Ultrasonic transducers; Ultrasonic variables measurement; Wavelength measurement;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717221
