Title :
A novel methdod for processing capacitive micromechanical ultrasonic transducers (cMUT)
Author :
Saarilahti, J. ; Blomberg, M. ; Haard, A. ; Kattelus, H.
Author_Institution :
VTT, Centre for Microelectron., Espoo, Finland
Abstract :
The cMUTs presented in this study are based on a new surface micromachining process, where part of the top electrode of the cMUT is fabricated of porous polysilicon. This method gives many advantages over the previously reported fabrication processes.
Keywords :
capacitive sensors; elemental semiconductors; micromachining; porous semiconductors; silicon; surface treatment; ultrasonic transducers; Si; cMUT; capacitive micromechanical ultrasonic transducers; fabrication processes; porous polysilicon; surface micromachining process; top electrode; Biomembranes; Capacitors; Conducting materials; Electrodes; Etching; Fabrication; Micromachining; Micromechanical devices; Silicon; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Conference_Location :
Munich, Germany
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1192480
