DocumentCode
3365037
Title
Simulation of cMUT radiating in water using a mixed finite element/boundary element approach
Author
Ballandras, S. ; Caronti, A. ; Stelchen, W. ; Wilm, M. ; Laude, V. ; Pastureaud, T. ; Lardat, R. ; Daniau, W.
Author_Institution
LPMO/CNRS - Universite de Franche-Comte, Besancon, France
Volume
2
fYear
2002
fDate
8-11 Oct. 2002
Firstpage
1075
Abstract
A 2D finite element analysis of cMUT is proposed, taking into account periodicity and radiation in fluids. The convergence of the calculation is verified using non periodic computations. The capability of cMUT radiating in water to generate low velocity wave guided at the fluid/silicon interface is theoretically pointed out.
Keywords
boundary-elements methods; convergence of numerical methods; elemental semiconductors; finite element analysis; micromechanical devices; silicon; ultrasonic transducers; underwater sound; 2D finite element analysis; cMUT; fluid/silicon interface; low velocity wave; micromachined ultrasound transducer; mixed finite element/boundary element approach; nonperiodic computations; periodicity; simulation; water; Acoustic transducers; Analytical models; Biomembranes; Computational modeling; Convergence; Electrostatics; Finite element methods; Periodic structures; Ultrasonic imaging; Ultrasonic transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
ISSN
1051-0117
Print_ISBN
0-7803-7582-3
Type
conf
DOI
10.1109/ULTSYM.2002.1192481
Filename
1192481
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