• DocumentCode
    3365037
  • Title

    Simulation of cMUT radiating in water using a mixed finite element/boundary element approach

  • Author

    Ballandras, S. ; Caronti, A. ; Stelchen, W. ; Wilm, M. ; Laude, V. ; Pastureaud, T. ; Lardat, R. ; Daniau, W.

  • Author_Institution
    LPMO/CNRS - Universite de Franche-Comte, Besancon, France
  • Volume
    2
  • fYear
    2002
  • fDate
    8-11 Oct. 2002
  • Firstpage
    1075
  • Abstract
    A 2D finite element analysis of cMUT is proposed, taking into account periodicity and radiation in fluids. The convergence of the calculation is verified using non periodic computations. The capability of cMUT radiating in water to generate low velocity wave guided at the fluid/silicon interface is theoretically pointed out.
  • Keywords
    boundary-elements methods; convergence of numerical methods; elemental semiconductors; finite element analysis; micromechanical devices; silicon; ultrasonic transducers; underwater sound; 2D finite element analysis; cMUT; fluid/silicon interface; low velocity wave; micromachined ultrasound transducer; mixed finite element/boundary element approach; nonperiodic computations; periodicity; simulation; water; Acoustic transducers; Analytical models; Biomembranes; Computational modeling; Convergence; Electrostatics; Finite element methods; Periodic structures; Ultrasonic imaging; Ultrasonic transducers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-7582-3
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2002.1192481
  • Filename
    1192481