Title :
New results on powder blasting techniques applied to the manufacture of piezocomposite structures
Author :
Sayah, A. ; Clatot, S. ; Wilm, M. ; Robert, L. ; Daniau, W. ; Gijs, M. ; Ballandras, S.
Author_Institution :
Inst. of Microelectron. & Microsystems, Ecole Polytech. Fed. de Lausanne, Switzerland
Abstract :
We present the last results concerning investigation of powder blasting techniques to micromachined complex-patterned piezoelectric composite transducers. This technology consists of a beam of eroding powder particles, etching an in-situ-masked PZT plate. We manufacture honeycomb-patterned structures, which can not be achieved with a standard saw-dicing technique.
Keywords :
lead compounds; micromachining; piezoelectric materials; piezoelectric transducers; powder technology; PZT; PbZrO3TiO3; eroding powder particles; honeycomb-patterned structures; in-situ-masked PZT plate; micromachined complex-patterned transducers; piezocomposite structures; powder blasting techniques; Etching; Fabrication; Manufacturing; Microelectronics; Micromachining; Particle beams; Powders; Protection; Steel; Testing;
Conference_Titel :
Ultrasonics Symposium, 2002. Proceedings. 2002 IEEE
Conference_Location :
Munich, Germany
Print_ISBN :
0-7803-7582-3
DOI :
10.1109/ULTSYM.2002.1192489
