Title :
Epitaxial growth of tungsten bronze (Sr,Ba)Nb2O6 thin films by chemical solution deposition
Author :
Aoyagi, Rintaro ; Takeda, Hiroaki ; Okamura, Soichiro ; Nishida, Takashi ; Shiosaki, Tadashi
Author_Institution :
Graduate Sch. of Mater. Sci., Nara Inst. of Sci. & Technol., Japan
Abstract :
Epitaxial growth feature of ferroelectric Sr0.5Ba0.5Nb2O6 (SBN) thin films synthesized by chemical solution deposition was investigated by enhanced XRD analyses. SBN thin films on MgO (100) crystallized to a mixture of end members SrNb2O6 and BaNb2O6 at 700°C (heating rate: 10°C). The sintering at over 1000°C (heating rate: 10°C) or at 700°C (heating rate: 1°C) was necessary in order to obtain the tetragonal tungsten bronze phase SBN. Two crystal lattice planes of (001)- and (310)-oriented SBN were intergrown an orientation of ±18.5° and 0° (90°), respectively
Keywords :
X-ray diffraction; barium compounds; ferroelectric thin films; liquid phase epitaxial growth; sintering; strontium compounds; (SrBa)Nb2O6; 1000 C; 700 C; MgO; MgO (100) substrate; SBN ferroelectric thin film; X-ray diffraction; chemical solution deposition; epitaxial growth; sintering; tetragonal tungsten bronze phase; Chemical analysis; Epitaxial growth; Ferroelectric materials; Heating; Niobium; Sputtering; Strontium; Transistors; Tungsten; X-ray scattering;
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5940-2
DOI :
10.1109/ISAF.2000.942464
