Title :
Preparation and properties of Bi-system perovskite oxide thin films by sputtering method
Author :
Watanabe, Masaru ; Ichinose, Noboru
Author_Institution :
Sch. of Sci. & Eng., Waseda Univ., Tokyo, Japan
Abstract :
Ferroelectric (Bi0.5Na0.5)TiO3 thin films were synthesized on various kinds of substrates such as MgO(100), glass and Pt/MgO(100) by the rf-magnetron sputtering technique. Single perovskite thin films were prepared on MgO(100) and Pt/MgO(100). The films deposited on MgO(100) and Pt/MgO(100) substrates showed an a-axis orientation. The film obtained on Pt/MgO(100) at a substrate temperature of 500°C, using a (Bi0.50Na0.75)TiO3 powder target had P r of 2.3 μC/cm2 and Ec of 20 kV/cm. The hysteresis loop of the film did not change up to 3 × 106 switching cycles
Keywords :
X-ray diffraction; bismuth compounds; dielectric hysteresis; dielectric polarisation; ferroelectric switching; ferroelectric thin films; piezoceramics; sodium compounds; sputter deposition; sputtered coatings; 500 degC; Bi-system perovskite oxide thin film; Bi0.5Na0.5TiO3; Ec; MgO; Pr; Pt-MgO; a-axis orientation; ferroelectric polarisation; ferroelectric switching; ferroelectric thin films; glass substrate; hysteresis loop; rf-magnetron sputtering technique; single perovskite thin films; Ceramics; Electrodes; Ferroelectric films; Ferroelectric materials; Glass; Piezoelectric films; Powders; Sputtering; Substrates; Temperature;
Conference_Titel :
Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on
Conference_Location :
Honolulu, HI
Print_ISBN :
0-7803-5940-2
DOI :
10.1109/ISAF.2000.942494
