Static analysis of millimeter wave transmission lines micromachined in silicon substrate

Author

Wenzhang Wang ; Yong Guo

Author_Institution

Dept. of Electr. & Comput. Eng., Clemson Univ., SC, USA

Volume

3

fYear

1994

fDate

20-24 June 1994

Firstpage

1960

Abstract

Several millimeter wave transmission lines fabricated on silicon substrate are investigated numerically. The structures of this kind of transmission lines consist of metal strips evaporated on oxynitride membrane with a silicon substrate as the mechanical supporting materials. The characteristic impedances for single strip transmission lines and coupled transmission lines are obtained as functions of the physical parameters by the point matching method.

Keywords

impedance matching; micromachining; microstrip lines; millimetre wave devices; silicon; strip lines; transmission line theory; transmission lines; Si; characteristic impedance; coupled transmission lines; mechanical supporting materials; metal strips; micromachined millimeter wave transmission lines; oxynitride membrane; physical parameters; point matching method; silicon substrate; static analysis; Biomembranes; Coaxial components; Conductors; Distributed parameter circuits; Millimeter wave technology; Silicon; Strips; Submillimeter wave propagation; Substrates; Transmission lines;

fLanguage

English

Publisher

ieee

Conference_Titel

Antennas and Propagation Society International Symposium, 1994. AP-S. Digest

Conference_Location

Seattle, WA, USA

Print_ISBN

0-7803-2009-3

Type

conf

DOI

10.1109/APS.1994.408152

Filename

408152