Title :
Integration of Pb(Zr,Ti)O3 thin films with photo-sensitive polymer
Author :
Okubo, Takashi ; Sano, Ryo ; Kanda, Kensuke ; Fujita, Takayuki ; Maenaka, Kazusuke
Author_Institution :
Grad. Sch. of Eng., Univ. of Hyogo, Himeji, Japan
Abstract :
This paper reports a batch fabrication process combining piezoelectric Pb(Zr,Ti)O3 (PZT) thin films with photosensitive polymer SU-8. Fabricated PZT/SU-8 structure shows small stiffness and less brittleness. In addition, the piezoelectric characteristics are equivalent to conventional PZT thin films on Si substrates. From the result of actuation experiments of cantilevers, the PZT/SU-8 structures show excellent flexibility. This allows 1-mm long cantilever to actuate at bending angle over 90 ° without breaking.
Keywords :
cantilevers; lead compounds; optical polymers; piezoelectric thin films; PZT; PZT/SU-8 structure; actuation experiments; batch fabrication process; bending angle; brittleness; cantilevers; flexibility; photosensitive polymer SU-8; piezoelectric characteristics; piezoelectric thin films; size 1 mm; stiffness; Actuators; Fabrication; Micromechanical devices; Polymers; Resonant frequency; Silicon; Substrates; Actuator; Flexibility; MEMS; PZT/SU-8 structure;
Conference_Titel :
Applications of Ferroelectric, International Symposium on Integrated Functionalities and Piezoelectric Force Microscopy Workshop (ISAF/ISIF/PFM), 2015 Joint IEEE International Symposium on the
Conference_Location :
Singapore
DOI :
10.1109/ISAF.2015.7172699
