Modeling and compensation of piezoelectric ceramic hysteretic behavior

Piezoelectric actuators are widely applied as actuators in micro/nano-positioning systems, due to its characteristic of infinitely small displacement resolution. While the tracking control accuracy of the piezoelectric actuator is limited because of their inherent hysteretic nonlinearity. This paper describes a mathematical model which could precisely compensate the hysteresis of piezoelectric actuator based on an inverse control in open-loop operation. The basis of the inverse control is formed by a hysteresis mathematical model, which can describe precisely phenomena. The novel hysteresis model makes use of polar coordinate which has the advantage that the proposed model simplifies the identification procedure of its inverse model. It is experimentally demonstrated that the tracking precision is significantly improved.