Title :
1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314)
Abstract :
The following topics were dealt with: factory design, manufacturing strategy and structure; manufacturing control and execution; defect reduction and yield enhancement; ultra clean technology; process and metrology equipment; process and material optimization; environmental, safety and health considerations
Keywords :
environmental factors; integrated circuit manufacture; integrated circuit measurement; integrated circuit yield; process control; process monitoring; production engineering computing; safety; semiconductor process modelling; semiconductor technology; surface cleaning; defect reduction; environmental considerations; factory design; health considerations; manufacturing control; manufacturing strategy; material optimization; metrology equipment; process equipment; process optimization; safety; semiconductor manufacturing; ultra clean technology; yield enhancement;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA, USA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808723
