Title :
Particle characteristics of 300-mm minienvironment (FOUP and LPU)
Author :
Kobayashi, S. ; Tokunaga, Kenji ; Kobayashi, Yoshiyuki ; Kato, Koji ; Minami, Teruo
Author_Institution :
Hitachi Ltd., Ibaraki, Japan
Abstract :
We have clarified the particle characteristics of a front opening unified pod (FOUP) and a load port unit (LPU) experimentally. The FOUP and LPU are fundamental components in 300-mm minienvironment systems. Our experiments showed that; (1) The particles per wafer pass (PWP) increases with the number of airborne particles outside the enclosure. (2) The particle characteristics of FOUP and LPU can be improved by reducing the FOUP door opening speed. (3) The PWP of the wafer in the top slot is remarkably high. By optimizing the FOUP door-opening speed, we can achieve FOUP and LPU particle characteristics similar to those of a standard mechanical interface (SMIF) system
Keywords :
clean rooms; surface contamination; 300 mm; FOUP; LPU; cleanliness; door opening speed; front opening unified pod; load port unit; minienvironment; particles per wafer pass; particulate contamination; semiconductor wafer fabrication; standard mechanical interface; Computational fluid dynamics; Contamination; Costs; Fabrication; Filters; Isolation technology; Manufacturing; Tires; Wiring;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808733
