Title :
Clustertool optimization through scheduling rules
Author :
Lemmen, B. ; Van Campen, E.J.J. ; Roede, H. ; Rooda, J.E.
Author_Institution :
Eindhoven Univ. of Technol., Netherlands
Abstract :
Clustertools play an increasing important role in modern semiconductor fabs. These tools are complex and have a large impact on fab performance. In this paper, a structured approach is presented to give insight in the dynamic behavior of clustertools and to optimize their performance. The approach is applied to the metal area of a waferfab. Scheduling rules are defined for clustertools of this area. A dynamic simulation model is used to evaluate the rules. Experiments show that an average improvement of 8 percent on cycle time and throughput is achieved by usage of scheduling rules
Keywords :
cluster tools; scheduling; semiconductor process modelling; clustertool optimization; cycle time; dynamic simulation model; scheduling rule; semiconductor fab; throughput; Application specific integrated circuits; Availability; Costs; Electronics industry; Foundries; Job shop scheduling; Performance analysis; Petroleum; Production facilities; Service robots;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808745
