Title :
Automation of engineering lot split-less for research and development fab
Author :
Orimoto, Junji ; Sugikawa, Yutaka ; Sada, Toshihiro ; Kabata, Kazuo ; Miyoshi, Hiroki ; Nagata, Tomotaka ; Shirai, Hidenori
Author_Institution :
VLSI Manuf. Eng. Div., NEC Corp., Sagamihara, Japan
Abstract :
Recently the market demands quick turn around time (TAT) to highly advanced R&D fab. The analysis on the lot TAT in our fab showed that the time for engineering lot split at ion implantation process reached to about 7.2% of the total lot TAT. The automation to enable split-less engineering lot at ion implantation could reduce the operation time in R&D fab. Engineering lot split-less systems could reduce the operation time with lot split operation by 3/4 for ion implantation. This system consists of manufacturing execution system (MES), master maintenance system (MMS), and engineering management system (EMS). This realized the 24 hours automated transfer of Engineering lot without any lot split operations
Keywords :
factory automation; integrated circuit manufacture; ion implantation; research and development management; automation; engineering lot split-less; engineering management system; ion implantation; manufacturing execution system; master maintenance system; operation time; research and development fab; semiconductor wafer fabrication; turn around time; Automotive engineering; Ion implantation; Level control; Manufacturing automation; National electric code; Production; Research and development; Research and development management; Systems engineering and theory; Very large scale integration;
Conference_Titel :
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-5403-6
DOI :
10.1109/ISSM.1999.808746
