DocumentCode
3367458
Title
Improving process control for older-generation tools by implementing equipment-level SPC
Author
Smith, Don D.
Author_Institution
Cypress Semicond., Round Rock, TX, USA
fYear
1999
fDate
1999
Firstpage
213
Lastpage
216
Abstract
With a properly implemented system, equipment-level SPC of process input variables dramatically increases sensitivity to process variations than traditional output SPC. We demonstrate that such a system (1) is readily implemented on older-generation process tools, (2) can be implemented at little to no cost in some cases, (3) prevents scrap by identifying real process problems that industry-standard output SPC misses
Keywords
control engineering computing; integrated circuit manufacture; ion implantation; production engineering computing; quality control; statistical process control; data analysis methodology; equipment-level SPC; ion implantation; older-generation process tools; process input variables; process variation sensitivity; quality metric; real process problem identification; scrap prevention; Algorithm design and analysis; Costs; Data analysis; Electrical equipment industry; Input variables; Metrology; Performance evaluation; Process control; Production systems; Software systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
0-7803-5403-6
Type
conf
DOI
10.1109/ISSM.1999.808774
Filename
808774
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