A low-cost, accurate and fast capacitive displacement sensor with microcontroller interfacing

Author

Toth, Ferry N. ; Meijer, G.C.M.

Author_Institution

Dept. of Electr. Eng., Delft Univ. of Technol., Netherlands

fYear

1992

fDate

12-14 May 1992

Firstpage

414

Lastpage

417

Abstract

A high-performance, capacitive displacement measuring system is described. Using a very linear oscillator, shielding and a three-signal approach, most of the errors are eliminated. The accuracy amounts to 1 μm over a 1-mm range. Since the output of the oscillator can be directly connected to a microcontroller, an analog-to-digital (A/D) converter is not needed. The system was tested in a fully automated setup, using an electrical XY table, the described sensor and a personal computer. Nonlinearity, long-term stability, and repeatability were verified

Keywords

computerised instrumentation; displacement measurement; electric sensing devices; peripheral interfaces; capacitive displacement sensor; computerised instrumentation; linear oscillator; long-term stability; microcontroller; microcontroller interfacing; repeatability; shielding; three-signal approach; Analog-digital conversion; Automatic testing; Capacitive sensors; Displacement measurement; Microcomputers; Microcontrollers; Oscillators; Sensor phenomena and characterization; Sensor systems; System testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1992. IMTC '92., 9th IEEE

Conference_Location

Metropolitan, NY

Print_ISBN

0-7803-0640-6

Type

conf

DOI

10.1109/IMTC.1992.245106

Filename

245106