DocumentCode
3368234
Title
An application for treating semiconductor manufacturing industrial wastewater to environmental protection agency drinking water standards
Author
Sandoval, Anna M.
Author_Institution
Intel Corp., Chandler, AZ, USA
fYear
1999
fDate
1999
Firstpage
413
Lastpage
416
Abstract
To meet a semiconductor manufacturing facility´s needs and ensure compliance with Arizona law, a unique water reduction and reclamation program was established between the City of Chandler and the manufacturer. Site water requirements were reduced from 5 million gallons per day to 1 million gallons per day through the use of reclaimed water, and recharge of treated wastewater into local aquifers
Keywords
environmental factors; integrated circuit manufacture; water treatment; Arizona law; City of Chandler; aquifers; drinking water standards; environmental protection agency; industrial wastewater; reclaimed water; reclamation program; semiconductor manufacturing; site water requirements; treated wastewater; water reduction; Biomembranes; Cities and towns; Filtration; Manufacturing industries; Protection; Reverse osmosis; Semiconductor device manufacture; Wastewater treatment; Water conservation; Water resources;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing Conference Proceedings, 1999 IEEE International Symposium on
Conference_Location
Santa Clara, CA
ISSN
1523-553X
Print_ISBN
0-7803-5403-6
Type
conf
DOI
10.1109/ISSM.1999.808824
Filename
808824
Link To Document