DocumentCode :
3368575
Title :
An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications
Author :
Chau, K.H.-L. ; Lewis, S.R. ; Zhao, Y. ; Howe, R.T. ; Bart, S.E. ; Marcheselli, R.G.
Author_Institution :
University of California, Berkeley Sensor & Actuator Center
Volume :
1
fYear :
1995
fDate :
25-29 Jun 1995
Firstpage :
593
Lastpage :
596
Keywords :
Accelerometers; Actuators; Automotive engineering; DH-HEMTs; Electric shock; Integrated circuit technology; Particle beams; Temperature distribution; Temperature sensors; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
Type :
conf
DOI :
10.1109/SENSOR.1995.717294
Filename :
717294
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3368575
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