Title :
A Piezoresistive Silicon Accelerometer With Monolithically Integrated CMOS-circuitry
Author :
Seidel, H. ; Fritsch, U. ; Gottinger, R. ; Schalk, J. ; Walter, J. ; Ambaum, K.
Author_Institution :
Daimler-Benz Research and Technology
Keywords :
Accelerometers; CMOS process; CMOS technology; Capacitive sensors; Fabrication; Machining; Mechanical sensors; Piezoresistance; Piezoresistive devices; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717295
