DocumentCode
3368588
Title
A Piezoresistive Silicon Accelerometer With Monolithically Integrated CMOS-circuitry
Author
Seidel, H. ; Fritsch, U. ; Gottinger, R. ; Schalk, J. ; Walter, J. ; Ambaum, K.
Author_Institution
Daimler-Benz Research and Technology
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
597
Lastpage
600
Keywords
Accelerometers; CMOS process; CMOS technology; Capacitive sensors; Fabrication; Machining; Mechanical sensors; Piezoresistance; Piezoresistive devices; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717295
Filename
717295
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