Title :
Integration Of A Large Tip With High Aspect Ratio On An XY-Micro Stage For AFM Imaging
Author :
Indermuhle, P.F. ; de Rooij, N.F.
Author_Institution :
University of Neuchatel
Keywords :
Atom optics; Atomic force microscopy; Electrostatic actuators; Frequency measurement; Optical detectors; Optical imaging; Optical sensors; Resonance; Resonant frequency; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717314
