DocumentCode

3368866

Title

Silicon Three-axial Tactile Sensor

Author

Chu, Z. ; Sarro, P.M. ; Middelhoek, S.

Author_Institution

Delft University of Technology

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

656

Lastpage

659

Keywords

Biomembranes; Capacitors; Force sensors; Glass; Intelligent sensors; Mechanical sensors; Polymers; Silicon; Spatial resolution; Tactile sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717315

Filename

717315