Title :
Silicon Three-axial Tactile Sensor
Author :
Chu, Z. ; Sarro, P.M. ; Middelhoek, S.
Author_Institution :
Delft University of Technology
Keywords :
Biomembranes; Capacitors; Force sensors; Glass; Intelligent sensors; Mechanical sensors; Polymers; Silicon; Spatial resolution; Tactile sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717315
