Title :
Preparation and application of benzoguanamine formaldehyde/silica composite abrasives slurry
Author :
Xu Xuefeng ; Yuzhi, Yang ; Guo Quan ; Weiwei, Hong ; Wei, Peng
Author_Institution :
Key Lab. of Special Purpose Equip. & Adv. Process. Technol., Zhejiang Univ. of Technol., Hangzhou, China
Abstract :
In order to improve the adsorption capacity between polymer particles and abrasives in composite abrasive slurry, the adsorption characteristics of PDADMAC on BGF particles and changes of BGF particles´ Zeta potential have been investigated. Two kinds of composite abrasive slurry were obtained with BGF particles before and after modified, and their polishing performance were studied by experiments. Experimental results show: at pH=10.5, the saturated adsorption of PDADMAC on BGF particles was about 3.67mg/g, and Zeta potential was increased from -42.3mV to 35mV; the adsorption capacity of SiO2 abrasives on BGF particles was improved after modified; the polishing rate was 469nm/min with the modified BGF/SiO2 composite abrasives slurry, increasing by 47% than that of the original BGF/SiO2 composite abrasives slurry.
Keywords :
abrasives; adsorption; chemical mechanical polishing; composite materials; electrokinetic effects; organic compounds; silicon compounds; slurries; BGF particles; PDADMAC; SiO2; Zeta potential; adsorption capacity; benzoguanamine formaldehyde-silica composite abrasives slurry; polishing performance; polymer particles; Abrasives; Chemical industry; Educational technology; Laboratories; Polymers; Silicon compounds; Slurries; Chemical Mechanical Polishing (CMP); composite abrasives; polishing slurry; polyelectrolyte;
Conference_Titel :
Mechanic Automation and Control Engineering (MACE), 2010 International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-7737-1
DOI :
10.1109/MACE.2010.5536787
