Waveguide-integrated InP/InGaAs/InAlGaAs MSM photodetectors

Author

Kollakowski, St. ; Kräutle, H. ; Lemm, Ch ; Böttcher, E.H. ; Bimberg, D.

Author_Institution

Inst. fur Festkorperphys., Tech. Univ. Berlin, Germany

fYear

1996

fDate

21-25 Apr 1996

Firstpage

223

Lastpage

225

Abstract

We report on novel waveguide-integrated MSM photodetectors with significantly enlarged coupling efficiency. This is achieved by using a vertically coupled In_0.53Al_0.31Ga_0.16As:Fe buried strip waveguide embedded in InP:Fe. The optical coupling efficiency from the guide into the photo-absorbing InGaAs:Fe was modeled using eigenmode calculations. The simulation results and the experimental data indicate that for an absorber thickness greater than 300 nm a coupling length as short as 15 μm is sufficient for 95% absorption. The high vertical coupling efficiency is obtained without using an additional impedance matching layer

Keywords

III-V semiconductors; aluminium compounds; eigenvalues and eigenfunctions; gallium arsenide; indium compounds; infrared detectors; integrated optics; metal-semiconductor-metal structures; optical communication equipment; optical couplers; optical waveguides; photodetectors; semiconductor device models; 15 mum; 300 nm; IR detectors; InAlGaAs:Fe; InP-InGaAs-InAlGaAs; InP/InGaAs/InAlGaAs MSM photodetectors; InP:Fe; absorber thickness; coupling length; eigenmode calculation; enlarged coupling efficiency; high vertical coupling efficiency; impedance matching layer; optical coupling efficiency; photo-absorbing InGaAs:Fe; simulation results; vertically coupled In_0.53Al_0.31Ga_0.16As:Fe buried strip waveguide; waveguide-integrated MSM photodetectors; Absorption; Detectors; Impedance matching; Indium gallium arsenide; Indium phosphide; Iron; Optical waveguides; Photodetectors; Refractive index; Strips;

fLanguage

English

Publisher

ieee

Conference_Titel

Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on

Conference_Location

Schwabisch-Gmund

Print_ISBN

0-7803-3283-0

Type

conf

DOI

10.1109/ICIPRM.1996.491977

Filename

491977