Software design tool to analyze waste streams generated by power semiconductor device fabrication processes

Author

Munukutla, L.V. ; Kuppuswamy, M.

Author_Institution

Arizona State Univ., AZ, USA

fYear

1995

fDate

9-11 Oct 1995

Firstpage

71

Lastpage

76

Abstract

A simulation software tool is developed to characterize the waste streams generated by the semiconductor device processing. The purpose of the software tool is to facilitate details such as: type of chemicals in the waste streams, waste segregation and quantitative analysis of the waste materials. The ultimate goal of this software tool is to design a semiconductor process flow that can generate minuscule quantities of waste streams with very low toxicity levels to maintain a clean environment. Free wheeling diode (FWD) fabrication process flow was selected to develop this software. The software tool was developed in the visual basic user interface environment under the Microsoft windows operating system. Semiconductor cleaning and etch operations were chosen as vehicles to demonstrate the software ability

Keywords

digital simulation; environmental factors; etching; power semiconductor devices; production engineering computing; semiconductor device manufacture; semiconductor process modelling; software tools; surface cleaning; waste disposal; clean environment; electronics manufacturing side effects; etch operations; free wheeling diode fabrication process flow; power semiconductor device fabrication; quantitative analysis; semiconductor cleaning; semiconductor process flow design; simulation software; software ability; software design tool; type of chemicals; very low toxicity levels; visual basic user interface environment; waste materials; waste segregation; waste streams;

fLanguage

English

Publisher

iet

Conference_Titel

Clean Electronics Products and Technology, 1995. (CONCEPT), International Conference on

Conference_Location

Edinburgh

Print_ISBN

0-85296-651-2

Type

conf

DOI

10.1049/cp:19951161

Filename

491992