Title :
Software design tool to analyze waste streams generated by power semiconductor device fabrication processes
Author :
Munukutla, L.V. ; Kuppuswamy, M.
Author_Institution :
Arizona State Univ., AZ, USA
Abstract :
A simulation software tool is developed to characterize the waste streams generated by the semiconductor device processing. The purpose of the software tool is to facilitate details such as: type of chemicals in the waste streams, waste segregation and quantitative analysis of the waste materials. The ultimate goal of this software tool is to design a semiconductor process flow that can generate minuscule quantities of waste streams with very low toxicity levels to maintain a clean environment. Free wheeling diode (FWD) fabrication process flow was selected to develop this software. The software tool was developed in the visual basic user interface environment under the Microsoft windows operating system. Semiconductor cleaning and etch operations were chosen as vehicles to demonstrate the software ability
Keywords :
digital simulation; environmental factors; etching; power semiconductor devices; production engineering computing; semiconductor device manufacture; semiconductor process modelling; software tools; surface cleaning; waste disposal; clean environment; electronics manufacturing side effects; etch operations; free wheeling diode fabrication process flow; power semiconductor device fabrication; quantitative analysis; semiconductor cleaning; semiconductor process flow design; simulation software; software ability; software design tool; type of chemicals; very low toxicity levels; visual basic user interface environment; waste materials; waste segregation; waste streams;
Conference_Titel :
Clean Electronics Products and Technology, 1995. (CONCEPT), International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
0-85296-651-2
DOI :
10.1049/cp:19951161
