Title :
Concepts for Carbon Nanotube Sensors
Author :
Hierold, Christofer
Author_Institution :
ETH Zurich, Zurich
Abstract :
This paper reports on concepts for carbon nanotube based sensors for mechanical and chemical quantities. We focus on single-walled carbon nanotubes as "simple" macro molecular functional structures with an option for integration in micro- and nanosystems or MEMS and NEMS and we discuss topics of relevance for fabrication. An extended reference list is included.
Keywords :
carbon nanotubes; chemical sensors; microsensors; molecular configurations; nanoelectronics; nanotube devices; MEMS; NEMS; carbon nanotube sensor; chemical quantities; macromolecular functional structures; mechanical quantities; single-walled carbon nanotubes; Carbon nanotubes; Chemical sensors; Electromechanical sensors; Fabrication; Mechanical sensors; Nanoelectromechanical systems; Nanoscale devices; Semiconductivity; Sensor systems; Transducers; NEMS; carbon nanotube; nanosensor; nanotransducer;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300059
