Title :
Micro Heater with PT-CR Thin Film Thermo-Couple for High Speed Biological Measurements
Author :
Gillot, F. ; Arata, H.F. ; Morin, F.O. ; Collard, D. ; Fujita, H.
Author_Institution :
Univ. of Tokyo, Tokyo
Abstract :
We present a thermal microdevice for high-speed biological measurements that combines a heater for fast temperature shifting (ms range) and a platinum/chromium thin film thermocouple (TFTC) for accurate temperature detection. The device, manufactured on quartz wafer, is successfully employed to measure the time required for unzipping of double strand DNA demonstrating its large capabilities.
Keywords :
DNA; bioMEMS; high-speed techniques; thermocouples; thin film devices; DNA; fast temperature shifting; high speed biological measurements; microheater; quartz wafer; temperature detection; thin film thermocouple; Chromium; DNA; Delay; Platinum; Temperature sensors; Thermal sensors; Time measurement; Transistors; Velocity measurement; Wire; Chromium; Micro-heater; Platinum; Thin Film ThermoCouple;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300062
