Title :
Advances in Thick-Film Sensors
Author_Institution :
Univ. of Southampton, Southampton
Abstract :
A review of the latest advances in thick-film sensors is presented. Examples are given of applications in the major signal domains. A brief history of the technology is presented and it is shown how thick-films can be combined with microelectromechanical systems (MEMS) to produce robust and cost-effective solutions to sensing problems. Some specific examples of mechanical transducers developed in the author´s own laboratories are presented.
Keywords :
microsensors; thick film sensors; transducers; major signal domains; mechanical transducers; microelectromechanical systems; thick-film sensors; Building materials; Capacitive sensors; Chemical sensors; Firing; Glass; Mechanical sensors; Resistors; Steel; Substrates; Thick film sensors; Thick-film; hybrid devices; sensor technology;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300083
