DocumentCode
3371427
Title
Harvesting Energy from Vibrations by a Micromachined Electret Generator
Author
Sterken, T. ; Fiorini, Paolo ; Altena, G. ; Van Hoof, C. ; Puers, R.
Author_Institution
lMEC, Leuven
fYear
2007
fDate
10-14 June 2007
Firstpage
129
Lastpage
132
Abstract
The development of low power autonomous systems has triggered the research for waste energy recuperation. A micromachined generator has been designed to extract energy from vibrations in the ambient. It consists of an electrostatic transducer which is continuously polarized by an electret. The design of the generator has been optimized towards miniaturization. A prototype has been fabricated.
Keywords
electric generators; electrostatic devices; micromechanical devices; vibrations; electrostatic transducer; harvesting energy; low power autonomous systems; micromachined electret generator; miniaturization; vibrations; waste energy recuperation; Design optimization; Electrets; Electrostatics; Frequency; Packaging; Polarization; Power generation; Resonance; Transducers; Vibrations; Power MEMS; electret; scavenger; vibration;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300088
Filename
4300088
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