DocumentCode :
3371476
Title :
Growth of InP single crystals by liquid encapsulated Czochralski (LEC) using glassy-carbon crucibles
Author :
de Oliveira, C.E.M. ; Miskys, C.R. ; de Carvalho, M.M.G.
Author_Institution :
Inst. de Fisica Gleb Wataghin, Univ. Estadual de Campinas, Sao Paulo, Brazil
fYear :
1996
fDate :
21-25 Apr 1996
Firstpage :
290
Abstract :
Summary form only given, as follows. The growth of InP single crystals by LEC is usually performed using quartz or pyrolitic boron nitrite (PBN) crucibles. In the case of the quartz crucible, the encapsulant (B2O3) sticks to its walls causing it to break during cooling. Moreover, quartz is a source for silicon contamination. PBN crucibles do not present these problems; however they are very expensive. Using a high pressure puller and glassy-carbon crucibles, undoped InP single crystals weighting 100 g and with 25 mm diameter were grown in the ⟨100⟩ direction. The residual carrier concentration of samples, measured by the Van der Pauw method at 300K, was about 5×1015 cm-3, a result as good as those obtained with quartz crucibles, with the advantage that glassy-carbon crucibles are fully reusable
Keywords :
III-V semiconductors; carrier density; crystal growth from melt; indium compounds; semiconductor growth; C; InP; Van der Pauw method; glassy-carbon crucibles; liquid encapsulated Czochralski growth; residual carrier concentration; semiconductor; single crystals; Boron; Cooling; Doped fiber amplifiers; Indium phosphide; Liquid crystals; Pollution measurement; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on
Conference_Location :
Schwabisch-Gmund
Print_ISBN :
0-7803-3283-0
Type :
conf
DOI :
10.1109/ICIPRM.1996.492034
Filename :
492034
Link To Document :
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