Title :
Semi-insulating behaviour of n-type lightly Fe-doped InP wafers after thermal annealing
Author :
Fornari, R. ; Zappettini, A. ; Gombia, E. ; Mosca, R. ; Curti, M. ; Chearkaoui, K. ; Manakchi, G.
Author_Institution :
Istituto MASPEC, CNR, Parma, Italy
Abstract :
As-grown Fe-doped semiconducting (SC) InP samples (residual carrier concentration ⩽1015 cm-3, estimated iron concentration 6-8×1015 cm-3) were seen to convert to semi-insulating (SI), with high resistivity and good mobility, when annealed under appropriate conditions. This fact is very interesting since it gives the opportunity of obtaining semi-insulating InP with low Fe content. In this paper we report the annealing parameters together with the results of an extensive characterization (by Hall effect, C-V, IR absorption and PICTS) of the treated samples. The results suggest that the conductivity drop is related to a considerable loss of shallow donors
Keywords :
Hall effect; III-V semiconductors; annealing; carrier mobility; deep level transient spectroscopy; electrical resistivity; impurity states; indium compounds; infrared spectra; iron; C-V characteristics; Hall effect; IR absorption; InP:Fe; PICTS; carrier mobility; conductivity drop; n-type lightly doped wafers; resistivity; semi-insulating behaviour; semiconductor; shallow donor loss; thermal annealing; Annealing; Conductivity; Current measurement; Electromagnetic wave absorption; Hall effect; Indium phosphide; Insulation; Iron; Semiconductivity; Spectroscopy;
Conference_Titel :
Indium Phosphide and Related Materials, 1996. IPRM '96., Eighth International Conference on
Conference_Location :
Schwabisch-Gmund
Print_ISBN :
0-7803-3283-0
DOI :
10.1109/ICIPRM.1996.492036