Title :
Smart Individual Switch Addressing of 5 Ã\x97 5 and 20 Ã\x97 20 MEMS Double-Switch Arrays
Author :
Braun, Stefan ; Oberhammer, Joachim ; Stemme, Göran
Author_Institution :
KTH - R. Inst. of Technol., Stockholm
Abstract :
This paper presents a smart row/column addressing scheme for large MEMS microswitch arrays, utilizing the pull-in / pull-out hysteresis of their electrostatic actuators to efficiently reduce the number of control lines. Single-chip 20 times 20 double-switch switch arrays with individually programmable 400 switch elements have been fabricated and the smart addressing scheme was successfully evaluated. The reproducibility of the actuation voltages within the array is very important for this addressing scheme and therefore the influence of effects such as isolation layer charging on the pull-in voltages has also been investigated.
Keywords :
electrostatic actuators; microswitches; MEMS double-switch arrays; MEMS microswitch arrays; electrostatic actuators; isolation layer charging; programmable switch elements; pull-in/pull-out hysteresis; smart individual switch addressing; smart row/column addressing; Biomembranes; Electrodes; Electrostatic actuators; Hysteresis; Micromechanical devices; Microswitches; Sensor arrays; Solid state circuits; Switches; Voltage; MEMS switches; electrostatic actuators; individual addressing; switch arrays;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300094
