An Rfmems Switched Capacitor Array for a Tunable Band Pass Filter

In this paper, we present an RFMEMS switched capacitor array, which is proposed as a RF component to achieve various kinds of tunable RF filters. Our RFMEMS switched capacitor array consists of RFMEMS direct contact switches and metal-insulator-metal capacitors. In order to obtain reliable capacitors, the metal sacrificial layer for the RFMEMS switch fabrication is also applied to the capacitor implementation. We have achieved a C- to Ku-band tunable band pass filter by using the RFMEMS switched capacitor array. The capacitance of capacitor is designed corresponding to each tuning state of the band pass filter, which is selected by the RFMEMS switch operation. The insertion losses of the band pass filter were 7.1dB, 4.9 dB and 6.2 dB at 8 GHz, 12 GHz and 16 GHz, respectively.