Title :
Analytic study on micro electromechanical systems sensor
Author :
Ping Zhang ; Gunxian Yang ; Zhiyong Zhang
Author_Institution :
Dept. of Mech. Eng., Zhengjiang High Vocational Technol. Sch., Zhenjiang, China
Abstract :
The pressure sensor is an important branch of micro electromechanical systems (MEMS). In this paper, the pressure sensor is explored and studied both on theory and experiment. The basic principle, the accuracy, the repeatability and the arrearage of the sensor are analyzed in details, which improve scientific basis for the sensor selection. At last, the chip structure of the sensor is explored clearly. Through the research, we find that the sensor designed in this paper has the chief advantages, such as the work reliability and high linearity.
Keywords :
microsensors; pressure sensors; reliability; MEMS; chip structure; high linearity; micro electromechanical system sensor; pressure sensor; work reliability; Accuracy; Electromechanical systems; Micromechanical devices; Silicon; Stress; Temperature measurement; Temperature sensors; Analytic Study; Micro electromechanical systems; Sensor;
Conference_Titel :
Electronic and Mechanical Engineering and Information Technology (EMEIT), 2011 International Conference on
Conference_Location :
Harbin, Heilongjiang
Print_ISBN :
978-1-61284-087-1
DOI :
10.1109/EMEIT.2011.6023998
