Title :
Low power thermo-optic tuning of vertically coupled InP microring resonators
Author :
Christiaens, Ilse ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Ghent Univ., Belgium
fDate :
31 May-4 June 2004
Abstract :
Vertically coupled microring resonators have been fabricated by polymer waferbonding with BCB. The low thermal conductivity of this polymer provides for a large thermo-optic tuning range of the microring resonator with very limited power.
Keywords :
III-V semiconductors; arsenic compounds; conducting polymers; gallium arsenide; gallium compounds; indium compounds; integrated optics; micro-optics; optical couplers; optical design techniques; optical fabrication; optical resonators; optical tuning; optical waveguides; thermal conductivity; thermo-optical effects; wafer bonding; InP-InGaAsP; polymer waferbonding; thermal conductivity; thermo-optic tuning; vertically coupled microring resonators; Conducting materials; Etching; III-V semiconductor materials; Indium phosphide; Lithography; Optical tuning; Polymers; Resonator filters; Substrates; Thermal conductivity;
Conference_Titel :
Indium Phosphide and Related Materials, 2004. 16th IPRM. 2004 International Conference on
Print_ISBN :
0-7803-8595-0
DOI :
10.1109/ICIPRM.2004.1442747
