Title :
SWNT Growth by LPCVD on Ferritin-Based Iron Catalyst Nanoparticles Towards CNT Sensors
Author :
Durrer, L. ; Helbling, T. ; Zenger, C. ; Jungen, A. ; Stampfer, C. ; Hierold, C.
Author_Institution :
ETH Zurich, Zurich
Abstract :
We investigated the growth of individual single-walled carbon nanotubes (SWNTs) by low pressure chemical vapor deposition (LPCVD) on Ferritin-based Fe catalyst. According to Ferritin adsorption measurements, we show that the SWNT density on the surface can be controlled by the Ferritin concentration in the adsorption solution. The grown SWNTs were contacted by Cr/Au layers, structured by electron beam lithography and lift-off, resulting in carbon nanotube (CNT) based field effect transistors (FET).
Keywords :
carbon nanotubes; catalysts; chemical vapour deposition; electron beam lithography; field effect transistors; nanoparticles; sensors; CNT sensor; FET; Ferritin concentration; LPCVD; SWNT growth; electron beam lithography; ferritin adsorption measurement; ferritin-based iron catalyst nanoparticle; field effect transistor; low pressure chemical vapor deposition; single-walled carbon nanotube; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Chromium; Density measurement; Electron beams; FETs; Gold; Iron; Nanoparticles; CNT based FET; Fe2O3 nanoparticles; Ferritin adsorption; LPCVD; SWNT growth;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300102
