• DocumentCode
    3371945
  • Title

    Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration

  • Author

    Camara, E.H.M. ; Pijolat, C. ; Courbat, J. ; Breuil, P. ; Briand, D. ; de Rooij, N.F.

  • Author_Institution
    Ecole Nat. Super. des Mines, Saint-Etienne
  • fYear
    2007
  • fDate
    10-14 June 2007
  • Firstpage
    249
  • Lastpage
    252
  • Abstract
    This paper presents the development of a gas pre-concentrator based on a micro-reactor in porous silicon filled with carbon nanopowders in solution. The particularity of this microsystem is its applicability in the fields of atmospheric pollution monitoring and explosives detection. The performances of the device are closely related to the design of the micro-reactor and the choice of the adsorbent material. The benefits of using porous silicon to ease the fixing of the carbon absorbent in the reactor and to enhance gas adsorption are also investigated. Preliminary results on a device based on a carbon adsorbent powder filled in a porous silicon micro-reactor for benzene pre-concentration are reported.
  • Keywords
    adsorption; air pollution; microchannel flow; microreactors; nanoparticles; adsorbent material; adsorbent powder; atmospheric pollution monitoring; explosives detection; gas preconcentrator; microfluidic channels; microreactor; nanopowders; Actuators; Carbon dioxide; Ear; Explosives; Mechanical sensors; Microfluidics; Nanoparticles; Powders; Silicon; Solid state circuits; gas sensors; micro-reactor; porous silicon; pre-concentrator;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
  • Conference_Location
    Lyon
  • Print_ISBN
    1-4244-0842-3
  • Electronic_ISBN
    1-4244-0842-3
  • Type

    conf

  • DOI
    10.1109/SENSOR.2007.4300116
  • Filename
    4300116