DocumentCode
3371945
Title
Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration
Author
Camara, E.H.M. ; Pijolat, C. ; Courbat, J. ; Breuil, P. ; Briand, D. ; de Rooij, N.F.
Author_Institution
Ecole Nat. Super. des Mines, Saint-Etienne
fYear
2007
fDate
10-14 June 2007
Firstpage
249
Lastpage
252
Abstract
This paper presents the development of a gas pre-concentrator based on a micro-reactor in porous silicon filled with carbon nanopowders in solution. The particularity of this microsystem is its applicability in the fields of atmospheric pollution monitoring and explosives detection. The performances of the device are closely related to the design of the micro-reactor and the choice of the adsorbent material. The benefits of using porous silicon to ease the fixing of the carbon absorbent in the reactor and to enhance gas adsorption are also investigated. Preliminary results on a device based on a carbon adsorbent powder filled in a porous silicon micro-reactor for benzene pre-concentration are reported.
Keywords
adsorption; air pollution; microchannel flow; microreactors; nanoparticles; adsorbent material; adsorbent powder; atmospheric pollution monitoring; explosives detection; gas preconcentrator; microfluidic channels; microreactor; nanopowders; Actuators; Carbon dioxide; Ear; Explosives; Mechanical sensors; Microfluidics; Nanoparticles; Powders; Silicon; Solid state circuits; gas sensors; micro-reactor; porous silicon; pre-concentrator;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location
Lyon
Print_ISBN
1-4244-0842-3
Electronic_ISBN
1-4244-0842-3
Type
conf
DOI
10.1109/SENSOR.2007.4300116
Filename
4300116
Link To Document