Title :
High Through-Put Parallel Biomolecules Sorting Microsystem with Three Dimensional PDMS Stack
Author :
Nara, Y. ; Sugino, H. ; Arakawa, T. ; Shirasaki, Y. ; Funatsu, T. ; Shoji, S.
Author_Institution :
Waseda Univ., Tokyo
Abstract :
High through-put parallel biomolecules sorter was fabricated with the three dimensional PDMS stack structure. Three dimensional channel structure was realized by using PDMS dry etching. High speed switching of 10 ms order in each channel was realized with four and eight parallel type sorter. Sorting rate is about 20 samples/sec in the case of the four parallel type sorter. High through-put sorting of about 20 times higher than that of the previous single channel sorter was obtained in actual E. coli cells separation.
Keywords :
etching; micromechanical devices; molecular biophysics; 3D PDMS stack; 3D channel structure; E. coli cells separation; PDMS dry etching; microsystem; parallel biomolecules sorter; Dry etching; Glass; Immune system; Microchannel; Molecular biophysics; Nonhomogeneous media; Pharmaceuticals; Resists; Sorting; Switches; Parallel Type Sorting System; Polydimethylsiloxane Etching; Polydimethylsiloxane Stack;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Conference_Location :
Lyon
Print_ISBN :
1-4244-0842-3
Electronic_ISBN :
1-4244-0842-3
DOI :
10.1109/SENSOR.2007.4300118
