On the field dependence of intrinsic and extrinsic time-dependent dielectric breakdown

In this study the field acceleration of intrinsic and extrinsic breakdown is studied. For the intrinsic mode an exp(1/E)-acceleration law is found, while for the extrinsic mode an new exp(E)-acceleration law for Q/sub BD/ is proposed. This field acceleration model is implemented in a maximum likelihood algorithm together with a new analytical expression for fitting competing Weibull distributions. With this algorithm an extensive t/sub BD/-data set measured at different stress conditions can be fitted excellently in one single calculation. From the result, predictions of low-field oxide reliability are made and the screening conditions in order to guarantee a pre-set reliability specification are calculated.